反射分光式膜厚計
Reflective spectroscopic film thickness gauge AFW-100W

This is a standard model equipped with a spectrometer suitable for coating thickness measurement in a compact housing with an integrated light source. Non-contact measurement is possible without disturbing the surface of the workpiece after coating.

A wide range of measurement wavelengths and measurable film thicknesses are covered.

Measurable wavelengths・・・380nm~1050nm

Measurement of possible film thickness

・・・100nm~60μm


Principle of Reflectance Spectrophotometer Measurement

When light shines on a transparent film, the light reflected on the film surface (R1) and the light refracted inside the film and reflected on the substrate surface (R2) overlap and the light is intensified or weakened.

This is called "interference of light". When the phases of the light match, the intensity increases; when they are out of phase, the intensity weakens.

The figure on the right is an image of "light interference. Reflectance spectrometer" is a method of measuring film thickness by analyzing the interference (wavelength) of light and converting it into a film thickness value.

反射分光式膜厚測定の理論

Calculate the theory

C/F(Curve Fitting)

Find the film thickness value at which the square of the difference between the measured and theoretical reflectance is the smallest.

Recommended for use when there are less than 3 waveforms (about 1 μm film thickness).

FFT(Fast Fourier Transform)

The number of interference waveforms indicating film thickness in a certain wavelength width is determined by FFT calculation, from which the wavelength width of one cycle is derived.

Recommended for use when there are 3 or more waveforms (about 1 µm film thickness).

Model AFW-100W
Purpose For general film thickness
Equipment Configuration Main body、Stand、Duplex Fiber(1.5m)、PC、Film Thickness Measurement Sample
Measurement wavelength range 380nm~1050nm
Film thickness measurement range 100nm~1μm(C/F)
1μm~60μm(FFT)
Measurement Reproducibility 0.2%~1%(Dependent on membrane quality)
Measuring spot diameter Approximately 7mm
Light Source 12V-50W halogen
Theory of measurement C/F / FFT
External Dimensions of Main body W230 × D230 × H135(mm)
External Dimensions of Stand W150 × D150 × H115(mm)
Approximate Weight 5.5kg ※Excluding PC
Power supply used AC100V 50/60Hz
Consumables Halogen Lamps

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